make dist error

I'm getting errors while executing "make dist" on git master head.

$ make dist
make dist
rm -rf postgresql-9.4devel* =install=
for x in `cd . && find . \( -name CVS -prune \) -o \( -name .git -prune \) -o -print`; do \
file=`expr X$x : 'X\./\(.*\)'`; \
if test -d "./$file" ; then \
mkdir "postgresql-9.4devel/$file" && chmod 777 "postgresql-9.4devel/$file"; \
else \
ln "./$file" "postgresql-9.4devel/$file" >/dev/null 2>&1 \
|| cp "./$file" "postgresql-9.4devel/$file"; \
fi || exit; \
done
make -C postgresql-9.4devel distprep
[snip]
/bin/tar chf postgresql-9.4devel.tar postgresql-9.4devel
/bin/tar: postgresql-9.4devel/src/bin/pg_controldata/pg_crc.c: File removed before we read it
/bin/tar: postgresql-9.4devel/src/bin/pg_resetxlog/pg_crc.c: File removed before we read it
/bin/tar: postgresql-9.4devel/src/backend/tcop/.#postgres.c: File removed before we read it
make: *** [postgresql-9.4devel.tar] Error 1
make: *** Deleting file `postgresql-9.4devel.tar'
--
Tatsuo Ishii
SRA OSS, Inc. Japan
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Japanese: http://www.sraoss.co.jp